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  • Advantages of Using "Confocal Laser Scanning Microscope"- Comparison to SEM and Roughness Gauge -

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Are you content with the results from surface profile inspections performed using the SEM?

*SEM = Scanning Electron Microscope

Doesn't your SEM leave you with something to be desired?

  • It takes a considerable amount of time to get the result. The result should be made available more quickly in a timely manner.
  • A specimen must be cut into small pieces and deposited with a chemical coating. Therefore the specimen can not be observed "as-is".
  • Images alone are not enough. Height and roughness information are also required.
  • The overall SEM setup procedure and operation are cumbersome. For example, high vacuum may be required.

Do you give up the benefits of more advanced microscopy by continuing to use a contact profilometer?

  • Do you think that it is impracticable to analyze the roughness in minute areas, such as the roughness on the surface of a metal bump, or on the pad of a PCB?
  • Do you consider it unavoidable for a specimen to get scratched?
  • Do you think that it is impossible to analyze the roughness on a sticky surface, such as on a surface with adhesive applied?

Aren't there some parts of a specimen that you cannot observe using the optical microscope?

  • There are types of defects that cannot be observed using the optical microscope.
  • One- or two-dimensional information is insufficient to make correct evaluations. Three-dimensional information is required.
  • Due to ever decreasing manufacturing tolerance values, high-accuracy measurement is now a mandatory function for microscopes.

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