Advantages of Using "Confocal Laser Scanning Microscope"- Comparison to SEM and Roughness Gauge -
Example applications of the laser scanning confocal microscope.
High-recision measurement
Two-dimensional measurement
- Best suited for the measurement of 1.5mm to 1µm widths.
- Both line-width measurement and geometric measurement (measurement of the diameter of a circle, etc.) are possible.
Three-dimensional measurement
- Best suited for the measurement of 1mm to 0.5µm bumps.
- A volume, capacity, surface area, etc., can be measured three-dimensionally.
- The thickness of a thin, transparent film can be measured.
Roughness analysis
- Best suited for the analysis of roughness of about Rz 0.1µm.
- Analysis of both line roughness and surface roughness is possible.
- Noncontact probing allows specimens to be free of scratches.
MEMS bump measurement
MEMS SEM image
High-resolution observation
- Magnifications greater than 10,000X, which is comparable to that of SEM.
- High contrast and resolution comparable to that of SEM.
- Observation in real time.
- Observation area: 2,560x2,560µm maximum.
- Capability of resolving a line or space of 0.12µm, which was never before possible using conventional optical microscopes.
MEMS laser DIC image
Acquisition of different types of information, such as 3D images, color images, etc.
- Observation of 3D profiles, which was never before possible using conventional optical microscopes.
- Observation of color images, which was impracticable with the SEM.
- Representation of 3D information by displaying contour lines and meshes.
- Identification of minute level differences on the surface of a specimen in DIC observation.
MEMS color 3D image
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