Advantages of Using "Confocal Laser Scanning Microscope"- Comparison to SEM and Roughness Gauge -
The confocal laser scanning microscope is useful in these applications!
Semiconductor
- Measurement of IC pattern
- Management of CMP process
- Measurement of depth of scratches caused by probe tips
- Control of polishing pad
- Measurement of the depth of cut during dicing operation
Scratch caused by a prober
IC packaging
- Measurement of bump level differences
- Measurement of bump volume
- Analysis of bump surface roughness
- Measurement of extraneous substances
- Observation of cracks
- Wire bonding part
Stud bump
Printed circuit board
- Control of metal wiring width and height, and impedance
- Depth and diameter of via hole, and roughness of bottom and surrounding areas
- Roughness of electrode pad surface
- Roughness of film surface
- Film thickness measurement
- Observation of corroded part, and analysis of roughness of corroded part
- Control of wear of precision drills
Copper wiring on flexible PCB
Precision drill for via hole drilling
Display
- Measurement of TFT pattern width and level difference
- Control of photo spacer height
- Measurement of PDP rib height
- Observation of fluorescent coating on PDP, and measurement of extraneous substances on fluorescent coating
- Inspection of extraneous substances on organic material part of organic EL
- Measurement of organic EL patterns
Pattern part
MEMS
- Observation of inkjet nozzle shape
- Measurement of MEMS pattern width and level difference
- Measurement of height aspect ratio and hole depth
- Observation of 3D profile
- Analysis of roughness
MEMS mirror electrode
Coil pattern
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