Wafer Loader AL110 : Features
High Operability and Extensibility
Two Types Available According to Wafer Sizes
Both the AL110-8 series for 200mm and 150mm/200mm wafers and the AL110-6 series which can be used for 150mm, 125mm, and 100mm wafers by changing the unit are available. Even small-diameter wafers can be transferred through non-contact centering. Additionally, the AL110-6 series can transfer 50mm and 75mm wafers (non-contact centering is disabled) by individual treatment.
Speedy Inspection Achieved by Reducing Takt Time
Reduction in wafer transfer time has been achieved by reducing time for con-contact centering, orientation flat/notch detection with a transmission-type photosensor, and wafer replacement.
Drastic Improvement in Cleanness
To decrease contact between the loader and wafers as much as possible, the AL110 employs a high-precision, non-contact centering mechanism. Also, to prevent dust generation during wafer transfer and loader operation, the AL110 control panel and front-face macro handle cover are made from stainless steel, drastically improving cleanness.
Safe Wafer Transfer with a Motorized Stage
A simplified station is implemented by combining the wafer loader with motorized stage MS200, which is capable of operating in synchronization with the loader.
Motorized Stage for AL110
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