Wafer Loader AL110 : Specifications
| Function/Model | 8"-specific Type | 8"&6" Combination Type | 4", 5", 6" Option Type | |||||||||||
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| L | LM | LB | MB | LMB | L | LM | LB | MB | LMB | L | LM | LMB | ||
| Wafer | 8" Orientation Flat Type, 8" Notch Type |  |
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| 6" Orientation Flat Type | |
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| 4", 5", 6" Orientation Flat Type | |
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| Cassette | Fluoroware H-bar Type | |
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| Number of Cassettes | 1 | |
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| Inspection Mode | Both 100-percent and Sampling Inspections Possible | |
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| Transfer Sequence | Micro Inspection (Microscopy) | |
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| Top-face Macro Inspection | |
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| Back-face Macro Inspection | |
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| Back-face Macro Re-inspection | |
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| Orientation Flat/Notch Alignment | 90°-step Alignment Enabled (Factory-set Alignment Available) | |
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| Non-contact Centering | |
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| Wafer Transfer System | Vacuum-contact Mechanical Arm System | |
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| Applicable Microscope* | Olympus Semiconductor Inspection Microscope MX61 | |
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| Olympus Semiconductor Inspection Microscope MX51 | |
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| Dimensions (mm) | 580(W) x580(D) x297(H) | 490(W) x520(D) x297(H) | ||||||||||||
| Mass (kg) | 30 | 32 | 31 | 31 | 33 | 30 | 32 | 31 | 31 | 33 | 26 | 28 | 30 | |
| Utility | Power supply: 100V to 120VAC, 0.90A or 220V to 240VAC, 0.55A, 50/60Hz | |||||||||||||
| Vacuum: -67kPa to -80kPa | ||||||||||||||
| Remark | * Some compatible microscopes other than MX61 and MX51 are available. For information contact Olympus.
For information about the wafer thickness in other than SEMI and JEIDA standards, contact Olympus. |
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