Industrial Microscopes Icons
 |
A method of observation to homogenously illuminate a specimen and capture the light transmitted through or reflected from the specimen. The most popular method used to obtain the contrast of a specimen image that varies with the difference in transmission factor or reflection ratio of the specimen. |
|---|---|
 |
A method of observation used to obliquely illuminate a specimen and capture only the light scattered upon the specimen surface. The background of the specimen image observed in this method is dark and minute flaws or steps on the specimen surface are highlighted by the scattered light, hence called the dark-filed observation. Slight flaws or steps on a mirror-finish specimen like a wafer or mirror, that is undetectable in the bright-field observation, can be detected with high sensitivity in this method. |
 |
A method of observation used to observe normally invisible minute steps on a specimen surface with the aid of the polarized nature and coherency of light. A specimen is illuminated with two light beams produced by splitting the illumination light transversely with the aid of a prism. Differentiating the two light beams reflected directly on the specimen produces a contrast of dark/bright, allowing three-dimensional observation of minute steps. |
 |
A method used to observe the most of the industrial applications are the case with auto-fluorescence that a specimen emits when eliminated with the aid of a light source of high intensity such as a mercury lamp. Since the auto fluorescence that a specimen emits is very weak, a microscope used for this purpose is integrated with a light source of high intensity and a special optical system capable of high-sensitive detection of only the target fluorescence. Major application includes the inspection/detection of dust/dirt, residual resist, and flaws on a wafer. |
 |
Method of the observation to detect the polarized nature or birefringence of a specimen as bright/dark contrast or difference in colors. This provides a means of observing the polarized nature of metallographic structure, minerals, liquid crystal, semiconductor materials, and disks. |
 |
Method of the observation to detect the polarized nature to alter the direction of light vibration of the contents or the crystal structure with high sensitivity. Color changes clearly in a specimen such as a crystal with the rotation of the polarization plate, allowing its polarized nature to be observed. Further, the attachment of a dedicated inspection plate to the observation optical system allows measurement of the polarizing direction and polarization intensity of a crystal structure not to mention those observations. |
 |
The method of observation featured with a high resolution which is unavailable with visible light, using deep ultraviolet rays of short wavelength as the light source. Since a deep ultraviolet ray is invisible a dedicated CCD camera is used to capture images to be observed on a monitor screen. Effective applications include increasingly microfabricated patterned wafer, magnetic head slider gaps, and microlithography. |
 |
A method of observation used to observe the internal structure of silicon wafers, IC chips and MEMS by transmitting it with the aid of the light source of near-infrared rays. This method allows non-destructive inspection of internal structures of semiconductor devices including SiP (System in Package) and three-dimensional integration and CSP (Chip Size Package) that are invisible with the use of a visible ray. |
 |
Light transmitted through a transparent specimen is captured by an objective lens. In this instance, differences in thickness, density, and color at any point of the specimen result in differences in light absorbing spectra to be observed as contrasts. |
 |
A microscope unit developed to be integrated as an optical system into production equipment for the purpose of observation and analysis. To facilitate the unit integration into equipment, the unit is made compact and light in weight. |
 |
A microscope having the main body, illumination tube, and revolver processed with conductive material or paint to keep the generated static electricity from affecting a specimen during microscopic observation. Quick electrostatic discharging will protect a specimen such as a magnetic head that is susceptible to static electricity from damage. |
 |
Different from an ordinary stereomicroscope which normally has a single objective lens, a microscope capable of mounting a revolver allows two objective lenses of different magnifications to be attached and used by switching. This allows observation to be performed over a wider magnification range than that available with the standard zooming range. |
 |
Focusing in microscopy can be automated. This greatly enhances the efficiency of observation and inspection while reducing the operator fatigue. Also in height measurement with a measuring microscope, autofocusing helps high accuracy measurement to be performed, eliminating the variation of measurements depending on the operator's skill. |
 |
A specimen stage for measuring microscopes used to facilitate measurement of a large specimen or a batch of specimens loaded. The measuring range of the stage is as large as 250x150mm, capable of coping with high-speed measuring requirements. |
 |
A specimen stage for measuring microscopes used to facilitate measurement of semiconductor devices as well as electronic parts. The stage measuring range is available from among 50x50, 100x50, 100x100, and 150x100mm according to the specimen size. |
 |
A system enabled to provide computer controls to motorized functions including the microscope focusing, magnification switching, observation method switching, illumination light adjustment, motorized stage control, and image capturing. Inspection efficiency can be enhanced through the reduction of operator workload with this system. |
 |
A microscope attached with a large stroke stage allowing observation to be performed over the entire surface of a 300mm wafer. Even a 17 inch FPD inspection can be performed when combined with a transmitted illumination. |
 |
A port used to attach a digital camera and Video Camera on the front and side of a microscope. Three image recording units can be attached simultaneously when combined with a trinocular tube. |
 |
The use of 405nm violet laser of wavelength shorter than the visible light allows observation to be performed with higher resolution than that of optical microscopes. |
 |
The main body is compact enough to be easily installed in a limited space. Further, it is portable thanks to its light weight and meets the requirements for speedy on-site inspections in rather complicated workplaces. |
 |
This function enables "line roughness measurement" of one line on a specimen surface and "surface roughness measurement" over the entire surface. Laser microscopes can acquire data compatible with that of conventional contact surface roughness measuring instruments by performing calibration and installing surface texture roughness parameters and filters that are identical to those of contact surface roughness measuring instruments. Additionally, due to the non-contact advantages, laser microscopes can measure the surface roughness of soft or adhesive specimens, which was difficult to measure with contact measuring instruments. |
End of main content
