Industrial Microscopes Icons
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This function allows visual macroscopic inspection of foreign matters, scratches, membrane irregularity, defocusing, etc. on the top surface of a wafer. The combination with the optional specialized macro lighting system makes the detection of defects easier. |
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This function allows visual macroscopic inspection of foreign matters, scratches, etc. on the back surface of a wafer. A wafer inspection angle can be selected from among the recipe settings or changed arbitrarily. |
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This device is compatible with the specification of one wafer cassette. It provides a flexible response to the customer's operation method and budget. |
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