Semiconductor/FPD Inspection Microscopes
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Click here for descriptions of semiconductor inspection icon.
MX61A
This motorized model (dedicated to the reflected illumination) is compatible with a 300mm wafer while enabling integrated control over the peripheral devices.
MX61L
This motorized model (shared for the reflected and transmitted illumination) is compatible with a 300mm wafer and 17-inch FPD glass board.
MX61
This motorized model (shared for the reflected and transmitted illumination) is compatible with a 200mm wafer and FPD glass board.
MX51
This manual model (shared for the reflected and transmitted illumination) is compatible with a 150mm wafer and FPD glass board.
MX-IR / BX-IR
This observation-dedicated model (shared for the reflected and transmitted illumination) is capable of observing the semiconductor inside state.
U-UVF248
This model is capable of observing deep ultraviolet light (DUV) at high magnification and high contrast.
AL120-12
This model is a wafer loader which contributes to improvement in yield and productivity of 300mm wafers.
AL120
Wafer Loader AL120 That Contributes to Improvement in Yield and Productivity of Small- to 200mm-diameter Wafers.
Click here for descriptions of microscope icon.
Click here for descriptions of semiconductor inspection icon.
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