Semiconductor/FPD Inspection Microscope MX61
Motorized Microscope for 200mm dia. Wafer/Glass Substrate Use with the Reflected/Transmitted Illumination
This model supports a variety of microscopy methods from brightfield to fluorescence observations. MX61 has achieved comfortable inspection environments including automatic control of the aperture stop while being interlocked with switching between objective lenses.
Semiconductor/FPD Inspection Microscope MX61
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| Wafer (Brightfield) | Wafer (Darkfield) |
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| Wafer (DIC) | Color Filter (Transmitted) |
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