Automatic Semiconductor Inspection Microscope MX61A
Automatic Control Microscope for a 300mm Wafer with the Reflected Illumination
This system can control all microscope environments including peripheral devices on hand. This motorized system always ensures optimal inspection environments independent of various conditions such as differences in specimen and operator.
Automatic Semiconductor Inspection Microscope MX61A
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| Wafer (Brightfield) | Wafer (Darkfield) |
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| Wafer (DIC) | Wafer (Fluorescence) |
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