Semiconductor/FPD Inspection Microscope MX61L
Motorized Microscope for 300mm dia. Wafer/17 inch Glass Substrate use Reflected/Transmitted Illumination
This model supports various observation methods from brightfield to fluorescence observations. Comfortable inspection environment has been achieved by such as automatic adjustment of aperture stop in synchronization with the switching of objective lenses. With a 14x12 inch stage installed, this model supports observation of a large specimen.
Semiconductor/FPD Inspection Microscope MX61L
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| Wafer (Brightfield) | Wafer (Darkfield) |
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| Wafer (DIC) | Color Filter (Transmitted) |
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