Inspection & Measurement Systems

Display

Brightfield Observation

Laser Printer Toner

Color information can be obtained from brightfield (Color) observation. Therefore, brightfield observation can be used effectively to observe a flaw on a color filter or to locate the position of an area of corrosion on metal.

DIC (Differential Interference Contrast) Observation

Reverse Face of a Wafer

In DIC observation, it is possible to observe a scratch or flaw as small as a few nanometers in height that could not be observed in a brightfield observation.

Laser Confocal

Observation with a much higher level of resolution impracticable with conventional microscopes is now possible through a combination of a 408 nm laser and confocal optics.

Circuits Patterns on Wafer

Confocal Image

Non Confocal Image

Laser Confocal DIC

Polymeric Film

Microscopic unevenness on a surface can be observed in three dimensions in real time, which is impossible with conventional laser microscopes. Observation of surface conditions with the level of dimensional reality comparable to that of an SEM has been made fully possible, opening up a new dimension in surface profile observation.

Split Screen Display

Stud Bump

An image observed in one observation mode and the same image observed in another observation mode can be displayed simultaneously during live observation. A target point can be located easily by observing a microscopic image with color information and a high-resolution LSM (Laser Scanning Microscope) image simultaneously. By using this two-screen display function, the quality of a specimen can be checked by comparing it with a reference specimen in live observation, and whether it is acceptable or not can be determined.

Measurement

Test Patterns (Chromium)

Real-time Distance Measurement

A distance can be measured in real time by using image intensity profile. A distance can be measured in live observation.