Olympus Industrial Microscopes : Confocal Laser Scanning Microscope LEXT OLS3100 : Features (4)

Confocal Laser Scanning Microscope LEXT OLS3100 : Features (4)

2D Images Processing
Reliability

Models to Respond to Individual Needs

Reliability

World's Highest Level of Resolution

0.12 µm Line and Space 14,400x

The optical system designed exclusively for use with 408-nm laser light (Violet Opt System) prevents the occurrence of aberrations associated with the use of a short-wavelength light source, and brings the highest performance out of the 408-nm light source. Such a high level of resolution has been made possible by the confocal optical system having an optimized circular pinhole and the high-speed XY scanner with the MEMS technology of Olympus. With the world's highest-level planar resolution, a line or space of 0.12 µm can be resolved.

Basic Concept of a Light Path in the Violet Opt System

Basic Concept of the Two-dimensional Scanner

Further Advanced, the World's Highest Level of Repeatability

Advanced optical techniques of Olympus accumulated over years have made possible the planar measurement repeatability of 3σ = 0.02 µm and the height measurement repeatability of 3σ = 0.04 + 0.002L mm (L = measured length in µm). A guide with high performance in terms of straightness and a high-precision linear scale are used for Z-axis scanning. These parts combined with the further advanced CFO search function contribute to very high level of repeatability. The high degree of reliability makes it possible for LEXT to meet the highly demanding needs of diverse fields of research and industry.

CFO Search Function

The original I-Z curve is drawn based on the upper, high-luminance points, and maximum luminance values are calculated with high accuracy by using an advanced formula. The high repeatability of LEXT is made possible through the height data being obtained in this process.

Measurements That Can Be Trusted

Highly reliable data can be provided based on the strict traceability system that is linked with the JCSS (Japan Calibration Service System).

トレーサビリティ体系図

Objective Lens Designed Exclusively for LEXT Confocal Laser Scanning Microscope

408nm Objective Lens

An apochromatic objective lens exclusively for Confocal Laser Scanning Microscope, which enables to improve the optical performance with a 408-nm laser light, was developed. This special objective lens developed with the world-class optical technology of Olympus has made possible the highest level of observational clarity and measurement accuracy at high magnifications.

5-step Sensitivity Switching Function

Simulations

LEXT allows sensitivity to be set at each Z position* and an image to be captured by switching from one level of sensitivity to another. In the case of a specimen with multi-structure patterns and holes, varying reflectances pose a difficulty in measuring the height. Using this sensitivity switching function, it is possible to obtain information on optimal height and luminance for such types of specimen.

* Sensitivity can be set for a maximum of five Z positions.

Enhanced Mode to Capture Clear Images of Specimens with Different Reflectances

In the case of a conventional laser microscope, it is difficult to turn specimens with different reflectances into an image, such as the surface of a printed circuit board or copper wiring board, or an inclined plane with weak reflection. LEXT equipped with the enhanced mode allows such specimens to be turned into clear images.

PCB(Printed Circuit Board) Enhanced Mode ON