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Confocal Laser Scanning Microscope LEXT OLS3100 : Features (5)

Models to Respond to Individual Needs

Motorized Stage/OLS30-CS150AS

Motorized Stage/OLS30-CS150AS

Configuration with a Motorized Stage
Configuration with a Motorized Stage


Stitching (Tiling) Function to Allow the User to Make Measurements over a Wider Area

Recipe Setting Screen
Recipe Setting Screen

LEXT is equipped with the tiling function for integrating a multiple of images into a single image. An observational area up to 12.8 mm x 12.8 mm can be viewed as one image. Measurement can also be made by viewing a tiled image. Furthermore, work efficiency can be increased considerably by specifying the image capturing method as a recipe setting.


Consecutive Measurement of Multiple Points

Consecutive Setting Screen
Consecutive Setting Screen

Registered positions on a specimen can be automatically and consecutively captured under the same conditions. This makes it possible to automate the taking of measurements.


Stitched(Tiled) Image/Measured Image
Confocal Laser Scanning Microscope for 300mm Wafer Observation/OLS3000-300

This product may not be available in your area. Please consult your Olympus dealer.

Confocal laser scanning microscope for 300-mm wafer observation/OLS3000-300


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