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Deep Ultraviolet Observation System for Microscope U-UVF248

Semiconductor/FPD Inspection Microscope U-UVF248

Model Capable of High-magnification/High-contrast Deep Ultraviolet (DUV) Observation

A high-contrast image can be achieved to the resolution limit of up to 0.08µm with an optical system optimized to deep ultraviolet light of 248nm. Either of the MX61L/MX61/MX51 can be mounted according to the size of a specimen.

Deep Ultraviolet Observation System for Microscope U-UVF248
Deep Ultraviolet Observation System for Microscope U-UVF248
Microscope Image
Wafer (DUV)
Wafer(DUV)

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